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ESD (Everything You Ever Wanted to Know About Air ionization)
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Everything You Ever Wanted to Know About Air ionization
ESD is a multi-step event.
Charge is generated, typically triboelectrically, accumulating
on some object. At some later time, a discharge occurs.
Ionizers prevent problems that would occur in few seconds
or longer from the time of generation of charge to the
discharge.
As many of our high tech industries
proceed rapidly along their technology roadmaps, one
thing has become clear:
The static charge problems will
only get worse. Whether the problem is particle attraction,
ESD damage to devices, or equipment malfunctions from
ESD-related electromagnetic interference, it gets worse
as time goes on.
The disk drive industry is a good example. With the
introduction of the magnetoresistive read (MR) head,
a technology barrier was reached due to static charge.
The MR head is damaged at very low levels of ESD and
manufacturing yields are essentially zero without an
extensive static control program.
It is just a matter of time before
a similar technology barrier due to static charge is
found in semiconductors, flat panel displays, or other
products.
Solving
the Static Problem
The basic elements of a static control program are
well known. The ESD Association has brought them together
in the static control program designed for the U.S.
military, ESD S20.20. It describes the various grounding
and materials issues needed to prevent the generation
of static charge and to slow the rate of discharge.
But, due to triboelectrification, primarily on insulators,
it is not possible to completely eliminate charge generation
from most workplaces. While eliminating all non-essential
insulators is helpful, there are always insulators present
in any work area. Most often they are part of the product
(e.g., epoxy device packages and circuit boards), but
sometimes they are required for high temperature or
chemical processing of the product. Finally, there may
be conductors that for some reason cannot be grounded.
While S20.20 recommends isolating charged insulators
from sensitive product, this is impractical in many
work areas.
Figure
1.
The Triboelectric Charge. Materials Make Intimate
Contact
Figure
2.
The Triboelectric Charge - Separation
ESD is a multi-step event.
Charge is generated, typically triboelectrically, accumulating
on some object. At some later time, a discharge occurs.
Ionizers prevent problems that would occur in few seconds
or longer from the time of generation of charge to the
discharge.
Some gas-powered ionizers can reduce the neutralization
time to under a second.
But ESD damage occurs in nanoseconds.
Ionizers cannot prevent ESD that occurs as soon as
the charge is generated. Ionizers are not a cure-all for all static problems,
but how else are you going to deal with charge on insulators?
Ionizers
in the Static Control Program
Ionizers are incorporated in the static control program
to solve the problems caused by charged insulators and
isolated conductors. Ionizers prevent the accumulation
of static charge on any object that cannot be connected
to ground. The shorter the time that static charge remains
on an object, the less likely it is to cause an ESD
event or attract contamination. Ionization is recommended
only when the other parts of the static control program
have failed to produce the desired results in reducing
an identified static problem.
If grounding and wrist straps solve the static problem,
you stop there. If the static-related losses are still
too high, maybe you add dissipative worksurfaces and
flooring. Finally, after you use every grounding method
available, you still have a static problem due to charge
on insulators that are essential to the manufacturing
process or part of your product. Then you use ionizers.
They are not a substitute for grounding methods, although
they will neutralize charge on conductors that cannot
be grounded.
Ionizer efficiency is affected by many environmental
factors including airflow patterns and nearby grounds.
You can always decide to use ionizers on the basis of
a horsepower contest, the fastest ionizer wins. But
the most important issue is whether the ionizers reduce
the static problem or not. This is not a decision made
on the basis of a particular device technology. All
devices are at hazard to charged insulators at some
level. Ionizers are needed to reduce charges on insulators
below the critical level for a given device or process.
It would not make sense to use wrist straps or dissipative
flooring without some testing to demonstrate a reduction
in the static problem. Any application of ionizers (or
any other static control method) should include testing
to show the impact on the static problem, whether it's
contamination, ESD damage, equipment lockups, or anything
else.
Once a decision has been made to use ionization, it
must face the same return on investment (ROI) analysis
that should be part of the decision-making process for
any static control method. This is critical, because
ionizers cost significantly more than wrist straps.
Once it has been demonstrated that ionizers reduce or
eliminate part of the static problem, and an installation
of ionizers has been proposed, it should be possible
to calculate how long it will take to pay back the costs
of the ionizer installation. Typically, this payback
period is one year or less. In critical ionizer applications,
such as protecting MR heads or semiconductor photomasks,
the payback might be calculated in days or even from
a single ESD event that is prevented. It makes no sense
to ask if ionizers are cost-effective compared to other
static control methods. Other static control methods
do not deal with charge on insulators. The real question
should be, what is the cost of not using ionizers to
solve a static problem caused by charge on insulators
or isolated conductors?
Air
Ionization Basics
All air ionization methods do the same basic thing;
they move electrons between gas molecules. If a gas
molecule loses an electron, it becomes positively charged,
or a positive ion. Conversely, if a gas molecule gains
an electron it is negatively charged, or a negative
ion. For purposes of static charge control we are concerned
with small air ions, which are generally molecular clusters
of up to 10 atoms about a water molecule. Positively
charged air ions tend to be larger and move about 20%
slower than negative air ions, which must be considered
when adjustable ionizer types are balanced.
Two basic methods are used to move electrons to create
ions, alpha ionization and corona ionization. Alpha
ionizers utilize a nuclear source, Polonium-210, which
is an alpha particle emitter. The alpha particle, a
helium nucleus, collides with air molecules knocking
out electrons, until it comes to a stop in about 3cm
in air. The gas molecules that lose electrons become
positive ions. The free electrons do not exist in air
for very long before they are captured by neutral gas
molecules, forming negative ions. It is important to
note at this point that alpha ionizers always produce
balanced quantities of positive and negative ions. Each
electron knocked out creates a positive ion, and when
captured creates a negative ion. Ions are always created
in equal numbers, advantageous in protecting sensitive
components like MR heads from ESD. Equal numbers of
ions means that the ionizer is always balanced to zero
volts and neutralizes everything in the work area to
zero.
Corona ionizers utilize high electric fields created
by applying high voltage to a sharp ionizing point to
move the electrons. Due to the decay of trace radioactive
elements in the soil and air, there are always a few
free electrons present in the air. If we create a high
positive electric field, the electrons are accelerated
towards the point, colliding with the air molecules
and knocking out more electrons as they move towards
the ionizing point. They leave behind large quantities
of molecules that have lost electrons, are thereby positive
ions, and are in a high positive electric field. This
field repels them away from the ionizing point, presumably
towards the area in which they are needed for charge
neutralization. Similarly, negative electric field accelerates
free electrons away from the ionizer point creating
collisions with gas molecules that increase the number
of free electrons available. These free electrons are
captured by neutral gas molecules in a short distance
from the ionizing point, creating negative ions, which
are then repelled away by the negative electric field.
Corona ionization generally does not provide the intrinsic
balance of alpha ionizers. Methods exist to assure that
closely balanced quantities of positive and negative
ions are delivered to the work area, despite differences
in ion mobilities and ion production rates for each
polarity. Similarly, some ionizers will include monitoring
and feedback capabilities to provide adequate long-term
stability of the ion balance in the work area. Ionizer
balance, or offset voltage, is measured with a Charged
Plate Monitor (CPM) using procedures defined in the
ESD Association ionization standard ANSI ESD STM3.1.
Ion balance is important because the imbalance of the
ionizer can induce voltages on isolated conductors,
just the opposite of why the ionizer is being used.
The ESD sensitivities of the products being protected
will generally determine the types of ionization that
are used. The more sensitive the product, the more precise
the methods the ionizer must use to maintain balance
and long term stability of the ion production. On the
other hand, problems such as particle attraction to
charged surfaces and ESD-related equipment problems
can be solved by almost any commercially available ionizer.
Solving these problems does not require ionizer balance
to better then a few hundred volts, as measured with
the CPM. Ionizer selection may involve several other
issues such as available airflow, distance from the
ionizer to the work area, and cleanroom compatibility
of the ionizer. The interaction of the ionizer and its
environment makes the selection process for ionizers
more complex than just choosing a wrist strap.
Types
of Corona Ionizers
There are several methods of using corona ionization
to both create and deliver bipolar air ionization to
the work area. The main difference between these methods
is whether high voltage AC, DC, or Pulsed DC current
is used to create ions. The following is a short description
of the differences in these corona ionization technologies
and a few examples of where each technology has been
applied.
AC
(Alternating Current) Ionization
AC (Alternating Current) Ionization - High voltage
is applied to a number of closely spaced emitter points,
which cycle negative and positive at the line frequency
(50/60Hz). Ionization efficiency is low, as the points
remain above the ionization threshold voltage for each
polarity only a small percentage of time. AC technology
is widely used in bars that control static charge on
low- and medium-speed moving webs. AC technology is
also used for ionizing blowers and blowoff gun devices.
AC ionizers are widely used in electronics manufacturing
areas to protect components during assembly. Due to
their dependence on the often unbalanced and noisy characteristics
of the power line, AC ionizers are rarely used in applications
requiring precision balance (less than +/-15 volts).
Due to the high ion currents required to make up for
high levels of ion recombination, particle levels from
AC ionizers usually make them unsuitable for cleanroom
applications.
Steady
State DC Ionization
Steady State DC Ionization - High voltage of both polarities
is continually applied to pairs of positive and negative
emitter points, thereby increasing the efficiency of
ion production over that of AC ionizers. Lower operating
currents can be used, making steady state DC ionizers
more applicable to cleanroom uses. The availability
of separate positive and negative high voltage supplies
makes it possible to employ various schemes for monitoring
and feedback control of ion balance to better than +/-5
volts. Steady State DC ionizers can be used in high
airflow rooms and used in high-speed web applications.
Steady DC technology is also used for ionizing blowers,
ionizing bars, and blowoff gun devices. Steady state
DC ionizers find wide application for controlling static
charge in room systems, worksurfaces and flow hoods,
and point-of-use applications in equipment.
Pulsed
DC
Pulsed DC - Positive and negative high voltage to the
emitter points are alternately turned on and off creating
clouds of positive and negative ions which mix together
in the work area. The result is a dramatic lowering
of the recombination rate, allowing ionizers to be placed
on the ceilings of rooms 5 meters or more in height.
Pulsed DC ionizers are used in rooms with low airflow
as well as being the most common type of ionizer in
cleanrooms and laminar flow hoods. The advantage of
this type of ionizer is its flexibility and versatility,
as cycle timing can be adjusted to the specific airflow
conditions. Since the polarity of the ionizer output
varies with the cycle timing, it produces a "voltage
swing" that must be limited to protect sensitive
devices. While in common use with semiconductor devices,
pulsed DC ionizers will generally not be used with sensitive
components such as MR heads.
Ionization
Standards and Measurements
The ESD Association issued a standard on air ionization,
ANSI EOS/ESD S3.1-1991, which was reaffirmed recently
with minor editorial changes as ANSI ESD STM3.1-2000.
It is still the only ionization standard recognized
worldwide, and has been referenced in many international
static control standards. As a standard test method
(STM) it contains only an instrument and test methodology
for comparing different systems -- or the same system
over time. It does not specify required performance,
due the variety of conditions under which air ionization
is used. However, for a specific application in protecting
100 volt HBM sensitive devices, the static control program
S20.20 recommends pulsed DC room ionization systems
with less than a +/-150 volt swing, and worksurface
ionization balanced to better than +/-50 volts. Discharge
times should always be specified by the end user to
meet the needs of solving the static charge problem.
The key instrument used in analyzing the effectiveness
of air ionizers is known as the Charged Plate Monitor
(CPM). The CPM has an isolated conductive plate that
can be charged to a known voltage. It then measures
the time required for the ionizer to reduce the charge
to 10% if its initial value. Ion balance, or offset
voltage, is measured by momentarily grounding the isolated
plate of the CPM in the ionized area, and then measuring
the voltage attained by the plate due to the balance
of the ionizer. Steady state DC ionizers will reach
a single value of positive or negative balance. Pulsed
DC ionizers will have both positive and negative maximum
voltage swings. AC ionizers will generally show a single
value of offset voltage. This CPM measurement for AC
ionizer balance is not accurate because the CPM is too
slow to follow the rapid fluctuation of the AC ionizer
output. Use of AC ionizers should be avoided in applications
with extremely ESD- sensitive components.
Conclusion
As with most technologies, there has been considerable
progress in the design of ionizers over the last twenty
years. Specialized ionizers exist for protecting extremely
ESD-sensitive components, high-speed industrial web
applications, and high quality cleanroom applications
among many other applications in electronics assembly,
optics, and medical devices. Manufacturers of ionizers
have learned to make the best use of the variety of
ionization technologies available.
As with any static control method, one should make
a decision to use ionization based on the best current
knowledge available, rather than relying on information
sources about technologies a decade or more out of date,
or misinformed consultants. It is hoped that this article
has presented information to assist you in making a
decision to appropriately use air ionization. The author
of this article welcomes your questions and comments
at asteinman@ion.com, and invites you to attend the
annual Ionization Tutorial at the ESD Association Symposium.
References
By Arnold Steinman.,
Chief Technology Officer, Ion Systems, Inc.
The material in this article first appeared in ESD
Today, the newsletter of the Silicon Valley ESD Society.
A shorter version also appeared in Taking Charge,
the newsletter of the Midwest Chapter.